Ion Energy and Angular Distribution in Biased Inductively Coupled Ar/O2 Discharges by Using a Hybrid Model

In this work, a global bulk plasma model coupled bi-d irectionally with a Monte-Carlo/fluid sheathmodel was developed for electronegative Ar/O2 inductive discharges, to explore the ion energy function (IEDF) and angular distributions function (IADF) bombarding an rf-biased electrode. At low bias voltage, the IEDF of Ar shows a single energy peak that transforms into a bimodal distribution with increasing bias voltage. The IEDFs of O 2 and O + are always bimodal. The ion energy peak separation width largely depends on the ion masses. The IADFs are affected by the bias voltage, pressures and coil powers. The results at different coil powers indicate the importance of considering the collisions induced by atoms, especially in a a molecular gas.